QML-CI
Inline Plasma System
Applications
QML-CI is a well-tested inline plasma cleaning system which has been designed to sustain all the demands of a 24/7 continuous inline production environment.
The first QML-CI system was delivered in 2015 with the purpose consistent results in a manufacturing environment. In manufacturing QML-CI is typically used for:
Plasma cleaning before wire-bonding on modules
Plasma cleaning before transfer molding on modules
Plasma cleaning on PCBs, BGA substrates
QML-CI has been used in a range of applications within the Semiconductors and Automotive industries, this applications span from the cleaning and activation of power modules, IGBTs and power MOSFETs.
QML-CI main advantage is its Conveyor-Indexer system which allows the loading and unloading of the plasma chamber in one movement, highly increasing its throughput.
Advanced traceability options are available on this system to easily integrate with a variety of Manufacturing Execution Systems (MES).
Specifications
Machine type
Inline plasma cleaner
Footprint
1460W x 1256L x 1773H mm
Plasma chamber configuration
Two tracks for products carrier
Max product size
Carrier: 200W x 300L x 30H mm (customizable)
Min product size
Carrier: 25W x 100L x 1H mm (customizable)
Plasma generator
300W RF Generator 13.56 MHz
Automatic tuning system
Gas Lines
2 Process gas lines with Mass Flow Controller
Pumping system
Dry vacuum pump 1000 L/min
Controller
Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software
Facilities
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications
CE, S2, S8, Cleanroom ISO7 (10k)
Options
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line
Compare SCI Systems
Category
Inline
Inline
-
Machine type
Inline plasma cleaner
Super-compact inline plasma cleaner
-
Footprint
1460W x 1256L x 1773H mm
478W x 1590L x 1727H mm
-
Plasma chamber configuration
Two tracks for products carrier
1 holder for products carrier
-
Max product size
Carrier: 200W x 300L x 30H mm (customizable)
Carrier: 200W x 300L x 25H mm (customizable)
-
Min product size
Carrier: 25W x 100L x 1H mm (customizable)
Carrier: 40W x 100L x 1H mm (customizable)
-
Plasma generator
300W RF Generator 13.56 MHz
Automatic tuning system
300W RF Generator 13.56 MHz
Automatic tuning system
-
Gas lines
2 Process gas lines with Mass Flow Controller
2 Process gas lines with Mass Flow Controller
-
Pumping system
Dry vacuum pump 1000 L/min
Dry vacuum pump 1000 L/min
-
Controller
Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software
Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software
-
Facilities
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
-
Certifications
CE, S2, S8, Cleanroom ISO7 (10k)
CE, S2, S8, Cleanroom ISO7 (10k)
-
Options
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line
-