TITAN
Batch Plasma Cleaning System
TITAN Batch Plasma Cleaner Applications
Titan is a batch plasma cleaning system designed to process lead frames in magazines.
Differently from others batch plasma systems, the Titan plasma chamber has been designed to accommodate up to 6 magazines in well-defined positions.
This guarantees that, no matter the magazine size, each lead frame in the magazine is processed equally and homogeneous results are obtained in all magazines.
This is the most important feature that has been considered during the design of Titan.
Processing lead frames in magazines can sometimes be preferred for fragile lead frames, or for lead frame that have already undergone wire-bonding. This avoids issues that may arise when automatic systems displace lead frames with wires that may break or be damaged.
The main applications of Titan are:
- Plasma cleaning before wire-bonding
- Plasma cleaning before transfer molding
TITAN Batch Plasma Cleaning System Specifications
Machine Type
Batch Plasma System
Footprint
794W x 1045L x 1705H mm
Plasma chamber configuration
6 dedicated holders for magazines
Max product size
Magazine: 100W x 250L x 150H mm
Min product size
N/A
Plasma generator
600W RF Generator 13.56 MHz
Automatic tuning system
Gas lines
2 Process gas lines with Mass Flow Controller
1 Purge line
Pumping system
Dry vacuum pump 1000 L/min
Controller
Win11 LTSC PC with fieldbus 21" Touchscreen
Proprietary SCI software
Facilities
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications
CE S2 S8 Cleanroom ISO7 (10k)
Options
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Compare SCI Systems
TITAN
Category
Lead frames
Lead frames
Lead frames
Machine Type
Batch Plasma System
Advanced Batch Plasma System
Automated Batch Plasma System
Footprint
794W x 1045L x 1705H mm
905W x 1222L x 1800H mm
Weight 700 kg
1561W x 2302L x 1931H mm
Weight 1400 kg
Plasma Chamber Configuration
6 dedicated holders for magazines
4 magazines in pre-defined positions
2 powered planar electrodes with insulated RF guards
Stainless steel AISI 304 chamber 450W x 450L x 450H mm (91.1 L)
Direct plasma
2 independent plasma chambers, each with 2 planar electrodes and 2 perpendicular gas distribution systems
Nickel-coated aluminium chambers 190W x 230L x 360H mm (15.7 L)
Direct plasma
Max product size
Magazine: 100W x 250L x 150H mm
Magazine: 240W x 302L x 160H mm
With or without side slots
Magazine: 115W x 150L x 253H mm
Min product size
N/A
N/A
Magazine: 90W x 50L mm
Plasma generator
600W RF Generator 13.56 MHz
Automatic tuning system
600W RF Generator 13.56 MHz
Automatic L/C tuning network with preset tuning
Silver-coated copper RF line
600W RF Generators 13.56 MHz
Automatic L/C tuning networks with preset tuning
Gas lines
2 Process gas lines with Mass Flow Controller
1 Purge line
2 Process gas lines with Mass Flow Controller
1 Purge line
Max flow rate 200 mL/min
2 Process gas lines with Mass Flow Controller
1 Purge line
Max flow rate 200 mL/min
Pumping system
Dry vacuum pump 1000 L/min
Dry vacuum pump 1000 L/min
Capacitive gauge 0.0001 to 1 mbar
Dry vacuum pump 1000 L/min
Capacitive gauge 0.0001 to 1 mbar
Controller
Win11 LTSC PC with fieldbus 21" Touchscreen
Proprietary SCI software
Win11 LTSC PC with fieldbus 21.5" Touchscreen
Proprietary SCI software
Win11 LTSC PC with fieldbus 21.5" Touchscreen
Proprietary SCI software
Facilities
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Single phase 110-240V 50/60 Hz 3.4KVA
CDA 5 to 6 bar
Process gas pressure 1 to 1.5 bar
Process gas purity 99.995% or better
Swagelok 6 mm OD gas fittings
Exhaust port 25 mm OD
Three phase 380-415V 50/60 Hz 9.3KVA
CDA 5 to 6 bar
Process gas pressure 1 to 1.5 bar
Process gas purity 99.995% or better
Swagelok 6 mm OD gas fittings
Exhaust ports 100 and 25 mm OD
Certifications
CE S2 S8 Cleanroom ISO7 (10k)
CE S2 S8 Cleanroom ISO5 (100)
CE S2 S8 Cleanroom ISO7 (10k)
Options
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Hydrogen generator (up to 500 mL/min)
1kW RF Generator 13.56 MHz
Dry vacuum pump 1670 L/min
Up to 4 mass flow controlled gas lines
Hydrogen generator (up to 500 mL/min)
1kW RF Generator 13.56 MHz
Dry vacuum pump 1670 L/min
Up to 4 mass flow controlled gas lines
Cleanroom ISO5 (100) compatible
Stainless steel AISI 304 plasma chamber