TITAN
Batch Plasma System
Applications
Titan is a batch plasma cleaning system designed to process lead frames in magazines.
Differently from others batch plasma systems, the Titan plasma chamber has been designed to accommodate up to 6 magazines in well-defined positions.
This guarantees that, no matter the magazine size, each lead frame in the magazine is processed equally and homogeneous results are obtained in all magazines.
This is the most important feature that has been considered during the design of Titan.
Processing lead frames in magazines can sometimes be preferred for fragile lead frames, or for lead frame that have already undergone wire-bonding. This avoids issues that may arise when automatic systems displace lead frames with wires that may break or be damaged.
The main applications of Titan are:
Plasma cleaning before wire-bonding
Plasma cleaning before transfer molding
Specifications
Machine type
Batch plasma cleaner for lead frames in magazines
Footprint
794W x 1045L x 1705H mm
Plasma chamber configuration
6 dedicated holders for magazines
Max product size
Magazine: 100W x 250L x 150H mm
Min product size
N/A
Plasma generator
600W RF Generator 13.56 MHz
Automatic tuning system
Gas Lines
2 Process gas lines with Mass Flow Controller
1 Purge line
Pumping system
Dry vacuum pump 1000 L/min
Controller
Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software
Facilities
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications
CE, S2, S8, Cleanroom ISO7 (10k)
Options
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Compare SCI Systems
Category
Lead frames
Lead frames
-
Machine type
Batch plasma cleaner for lead frames in magazines
Standalone plasma cleaner for lead frames in magazines
-
Footprint
794W x 1045L x 1705H mm
784W x 1838L x 1566H mm
-
Plasma chamber configuration
6 dedicated holders for magazines
4 or 5 strips processed at the same time
-
Max product size
Magazine: 100W x 250L x 150H mm
Lead frame: 100W x 300L x 1.5H mm
Magazine: 107W x 300L x 250H mm
-
Min product size
N/A
Lead frame: 22W x 300L x 1.5H mm
Magazine: 30W x 300L x 100H mm
-
Plasma generator
600W RF Generator 13.56 MHz
Automatic tuning system
600W RF Generator 13.56 MHz
Automatic tuning system
-
Gas lines
2 Process gas lines with Mass Flow Controller
1 Purge line
2 Process gas lines with Mass Flow Controller
-
Pumping system
Dry vacuum pump 1000 L/min
Dry vacuum pump 1000 L/min
-
Controller
Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software
Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software
-
Facilities
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
-
Certifications
CE, S2, S8, Cleanroom ISO7 (10k)
CE, S2, S8, E10, Cleanroom ISO7 (10k)
-
Options
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package to scan each lead frame
Purge line
-