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What is Atomic Oxygen (O)?
Atomic oxygen is a highly reactive form of oxygen produced in plasma environments when molecular oxygen (O₂) is dissociated into individual atoms. Due to its strong oxidative properties, atomic oxygen is widely used for cleaning organic contaminants, surface activation, and thin-film oxidation. It is particularly useful in semiconductor processing, aerospace applications, and biomedical material treatments.
Visit our detailed glossary section for plasma cleaning terms or visit our blog dedicated to sharing useful content related to plasma cleaning
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