What is torr?

The torr is a unit of pressure equal to 1/760 of a standard atmosphere, or about 133 pascals. It remains the common working unit in vacuum plasma processing, where chamber pressures are typically expressed in torr or millitorr. Pressure matters because it sets the mean free path of the gas: too high and the process becomes more chemical and less directional, too low and there are too few molecules to sustain a useful plasma density.

Visit our detailed glossary section for plasma cleaning terms or visit our blog dedicated to sharing useful content related to plasma cleaning