QML-2MAG
Automated Batch Plasma Cleaning System
QML-2MAG Automated Batch Plasma Cleaner Applications
QML-2MAG is an automated batch plasma cleaning system engineered for lead frames in magazines. It combines the gentleness of batch plasma processing, where every lead frame stays in its magazine, with the automation required for high-throughput production: magazines are loaded and unloaded automatically, and the system is fully compatible with standard SMEMA lines for seamless integration into automated manufacturing environments.
It sits between Titan, our operator-loaded batch system for magazines, and Quadrio Alpha, which takes each lead frame out of its magazine for processing. QML-2MAG processes whole magazines, as Titan does, with the automated handling of a production system. Lead frames are never picked out of their magazines, which significantly reduces operator handling and the risk of damage to delicate or already wire-bonded frames.
The system features two independent plasma chambers, each equipped with a dedicated gas distribution system that directs the process gas precisely between the magazine slots, for uniform and effective plasma cleaning across all lead frames. Plasma is ignited by two planar RF electrodes positioned orthogonally to the gas flow, maximising energy efficiency and cleaning performance.
The main applications of QML-2MAG are:
- Plasma cleaning before wire-bonding
- Plasma cleaning before transfer molding
- Plasma cleaning before under-fill
- Plasma cleaning on PCBs and BGA substrates handled in magazines
Process gases include pure Ar, He, O2, N2 and H2, and N2/H2, Ar/O2 and Ar/H2 mixtures. Fluorinated gases (CF4, SF6) and others are available on request.
Like all SCI production systems, QML-2MAG runs the SCI plasma software on an industrial Windows PC with a 21.5" touch screen: full manual and automatic operation, user access levels, process programs with every variable under recipe control, and automatic advanced logging.
QML-2MAG Automated Batch Plasma System Specifications
Machine Type
Automated Batch Plasma System
Footprint
1561W x 2302L x 1931H mm
Weight 1400 kg
Plasma chamber configuration
2 independent plasma chambers, each with 2 planar electrodes and 2 perpendicular gas distribution systems
Nickel-coated aluminium chambers 190W x 230L x 360H mm (15.7 L)
Direct plasma
Max product size
Magazine: 115W x 150L x 253H mm
Min product size
Magazine: 90W x 50L mm
Plasma generator
600W RF Generators 13.56 MHz
Automatic L/C tuning networks with preset tuning
Gas lines
2 Process gas lines with Mass Flow Controller
1 Purge line
Max flow rate 200 mL/min
Pumping system
Dry vacuum pump 1000 L/min
Capacitive gauge 0.0001 to 1 mbar
Controller
Win11 LTSC PC with fieldbus 21.5" Touchscreen
Proprietary SCI software
Facilities
Three phase 380-415V 50/60 Hz 9.3KVA
CDA 5 to 6 bar
Process gas pressure 1 to 1.5 bar
Process gas purity 99.995% or better
Swagelok 6 mm OD gas fittings
Exhaust ports 100 and 25 mm OD
Certifications
CE S2 S8 Cleanroom ISO7 (10k)
Options
Hydrogen generator (up to 500 mL/min)
1kW RF Generator 13.56 MHz
Dry vacuum pump 1670 L/min
Up to 4 mass flow controlled gas lines
Cleanroom ISO5 (100) compatible
Stainless steel AISI 304 plasma chamber
Compare SCI Systems
QML-2MAG
Category
Lead frames
Lead frames
Lead frames
Machine Type
Automated Batch Plasma System
High Volume Plasma System
Fully Automatic Plasma System
Footprint
1561W x 2302L x 1931H mm
Weight 1400 kg
784W x 1838L x 1566H mm
1296W x 1496L x 1890H mm
Plasma Chamber Configuration
2 independent plasma chambers, each with 2 planar electrodes and 2 perpendicular gas distribution systems
Nickel-coated aluminium chambers 190W x 230L x 360H mm (15.7 L)
Direct plasma
4 or 5 strips processed at the same time
5 strips processed at the same time
Max product size
Magazine: 115W x 150L x 253H mm
Lead frame: 100W x 300L x 1.5H mm Magazine: 107W x 300L x 250H mm
Lead frame: 100W x 300L x 1.5H mm
Magazine: 115W x 305L x 250H mm
Min product size
Magazine: 90W x 50L mm
Lead frame: 22W x 50L x 0.05H mm Magazine: 30W x 50L mm
Lead frame: 20W x 50L x 0.05H mm
Magazine: 25W x 50L mm
Plasma generator
600W RF Generators 13.56 MHz
Automatic L/C tuning networks with preset tuning
600W RF Generator 13.56 MHz
Automatic tuning system
600W RF Generator 13.56 MHz
Automatic tuning system
Gas lines
2 Process gas lines with Mass Flow Controller
1 Purge line
Max flow rate 200 mL/min
2 Process gas lines with Mass Flow Controller
2 Process gas lines with Mass Flow Controller
Pumping system
Dry vacuum pump 1000 L/min
Capacitive gauge 0.0001 to 1 mbar
Dry vacuum pump 1000 L/min
Dry vacuum pump 5000 L/min
Controller
Win11 LTSC PC with fieldbus 21.5" Touchscreen
Proprietary SCI software
Win11 LTSC PC with fieldbus 21" Touchscreen
Proprietary SCI software
Win11 LTSC PC with fieldbus 21" Touchscreen
Proprietary SCI software
Facilities
Three phase 380-415V 50/60 Hz 9.3KVA
CDA 5 to 6 bar
Process gas pressure 1 to 1.5 bar
Process gas purity 99.995% or better
Swagelok 6 mm OD gas fittings
Exhaust ports 100 and 25 mm OD
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Three phase 380-415V 50/60 Hz, 15.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications
CE S2 S8 Cleanroom ISO7 (10k)
CE S2 S8 E10 Cleanroom ISO7 (10k)
CE S2 S8 E10 Cleanroom ISO7 (10k)
Options
Hydrogen generator (up to 500 mL/min)
1kW RF Generator 13.56 MHz
Dry vacuum pump 1670 L/min
Up to 4 mass flow controlled gas lines
Cleanroom ISO5 (100) compatible
Stainless steel AISI 304 plasma chamber
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package to scan each lead frame
Purge line
Kit for using pure hydrogen and hydrogen generator
Traceability package to scan each lead frame
Purge line