QML-B XL
Heavy Duty Inline Plasma System
QML-B XL Inline Plasma Cleaner Applications
QML-B XL is a heavy duty inline plasma cleaning system built around a large plasma chamber, which allows the fast treatment of big trays and assemblies in a compact space.
Its main advantage is the 44.4 L plasma chamber, which accepts products up to 533 x 280 x 180H mm. The chamber, conveyors, dry vacuum pump and RF generator are all integrated in a single cabinet, and QML-B XL connects inline to the upstream and downstream equipment through its SMEMA interface, so products are processed with no manual handling.
For carriers up to 200 x 300 mm on lines where floor space is the constraint, QML-B is the super-compact option at 480 mm wide.
QML-B XL can be used for inline processing:
- Plasma cleaning before wire-bonding on modules
- Plasma cleaning before transfer molding on modules
- Plasma cleaning before under-fill
- Plasma cleaning on PCBs and BGA substrates
Process gases include pure Ar, He, O2, N2 and H2, and N2/H2, Ar/O2 and Ar/H2 mixtures. Fluorinated gases (CF4, SF6) and others are available on request.
Advanced traceability options, such as the integrated 2D code reader, are available to easily integrate with a variety of Manufacturing Execution Systems (MES). QML-B XL runs the SCI plasma software on an industrial Windows PC with a 21.5" touch screen: full manual and automatic operation, user access levels, process programs with every variable under recipe control, and automatic advanced logging.
QML-B XL Inline Plasma System Specifications
Machine Type
Heavy Duty Inline Plasma System
Footprint
1638W x 1843L x 1751H mm
Weight 1300 kg
Plasma chamber configuration
1 plasma chamber with 1 planar powered electrode and integrated gas distribution system
Nickel-coated aluminium chamber 563 x 318 x 303H mm (44.4 L)
Direct plasma
Max product size
Product: 533 x 280 x 180H mm
Min product size
–
Plasma generator
600W RF Generator 13.56 MHz
Automatic L/C tuning network with preset tuning
Gas lines
2 Process gas lines with Mass Flow Controller
Max flow rate 200 mL/min
Pumping system
Dry vacuum pump 5000 L/min with booster
Capacitive gauge 0.0001 to 1 mbar
Controller
Win11 LTSC PC with fieldbus 21.5" Touchscreen
Proprietary SCI software
Facilities
Three phase 380-415V 50/60 Hz 7KVA
CDA 5 to 6 bar
Process gas pressure 1 to 1.5 bar
Process gas purity 99.995% or better
Swagelok 6 mm OD gas fittings
Exhaust port 40 mm OD
Certifications
CE S2 S8 Cleanroom ISO7 (10k)
Options
Traceability package with integrated 2D code reader
Nitrogen purge line
Hydrogen generator (up to 500 mL/min)
Up to 4 mass flow controlled gas lines
Cleanroom ISO5 (100) compatible
Stainless steel AISI 304 plasma chamber
Compare SCI Systems
QML-B XL
Category
Inline
Inline
Inline
Machine Type
Heavy Duty Inline Plasma System
Dual-Lane Inline Plasma System
Four-Lane Inline Plasma System
Footprint
1638W x 1843L x 1751H mm
Weight 1300 kg
1424W x 1847L x 1636H mm
1380W x 2560L x 1636H mm
Plasma Chamber Configuration
1 plasma chamber with 1 planar powered electrode and integrated gas distribution system
Nickel-coated aluminium chamber 563 x 318 x 303H mm (44.4 L)
Direct plasma
Two tracks for each products carrier
Two plasma chambers each containing two carriers
Max product size
Product: 533 x 280 x 180H mm
Carrier: 200W x 315L x 35H mm (customizable)
Carrier: 170W x 315L x 35H mm (customizable)
Min product size
–
Carrier: 35W x 100L x 1H mm (customizable)
Carrier: 35W x 100L x 1H mm (customizable)
Plasma generator
600W RF Generator 13.56 MHz
Automatic L/C tuning network with preset tuning
600W RF Generator 13.56 MHz
Automatic tuning system
Double 600W RF Generator 13.56 MHz
Automatic tuning systems
Gas lines
2 Process gas lines with Mass Flow Controller
Max flow rate 200 mL/min
2 Process gas lines with Mass Flow Controller
2 Process gas lines with Mass Flow Controller
Pumping system
Dry vacuum pump 5000 L/min with booster
Capacitive gauge 0.0001 to 1 mbar
Dry vacuum pump 1000 L/min
Double dry vacuum pump 1000 L/min
Controller
Win11 LTSC PC with fieldbus 21.5" Touchscreen
Proprietary SCI software
Win11 LTSC PC with fieldbus 16" Touchscreen
Proprietary SCI software
Win11 LTSC PC with fieldbus 16" Touchscreen
Proprietary SCI software
Facilities
Three phase 380-415V 50/60 Hz 7KVA
CDA 5 to 6 bar
Process gas pressure 1 to 1.5 bar
Process gas purity 99.995% or better
Swagelok 6 mm OD gas fittings
Exhaust port 40 mm OD
Single phase 110-240V 50/60 Hz, 4.8KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Three phase 380-415V 50/60 Hz, 15.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications
CE S2 S8 Cleanroom ISO7 (10k)
CE S2 S8 Cleanroom ISO7 (10k)
CE S2 S8 Cleanroom ISO7 (10k)
Options
Traceability package with integrated 2D code reader
Nitrogen purge line
Hydrogen generator (up to 500 mL/min)
Up to 4 mass flow controlled gas lines
Cleanroom ISO5 (100) compatible
Stainless steel AISI 304 plasma chamber
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line