JUNO-M
Advanced Batch Plasma System for Lead Frames in Magazines
JUNO-M Batch Plasma Cleaner Applications
JUNO-M is an advanced standalone batch plasma cleaning system for lead frames in magazines, designed for the toughest cases: hard-to-clean lead frames, magazines without side slots and ISO5 cleanrooms.
Batch plasma processing of lead frames in magazines normally requires magazines with open slots on the sides, so that the process gas and the plasma can reach every lead frame inside. JUNO-M processes both slotted magazines and standard magazines without slots, and gives good cleaning results on non-slotted magazines in process times similar to slotted ones.
Its stainless steel AISI 304 plasma chamber holds 4 magazines in pre-defined positions between two powered planar electrodes with insulated RF guards, which guarantees optimal RF and gas distribution to every magazine.
JUNO-M is a version of our JUNO batch system, designed from the start for high-level cleanrooms: it is ISO5 (class 100) cleanroom compatible as standard. For slotted magazines in an ISO7 cleanroom, Titan takes up to six magazines per batch.
The main applications of JUNO-M are:
- Plasma cleaning before wire-bonding
- Plasma cleaning before transfer molding
Process gases include pure Ar, He, O2, N2 and H2, and N2/H2, Ar/O2 and Ar/H2 mixtures. Fluorinated gases (CF4, SF6) and others are available on request.
Like all SCI production systems, JUNO-M runs the SCI plasma software on an industrial Windows PC with a 21.5" touch screen: full manual and automatic operation, user access levels, process programs with every variable under recipe control, and automatic advanced logging.
JUNO-M Batch Plasma System Specifications
Machine Type
Advanced Batch Plasma System
Footprint
905W x 1222L x 1800H mm
Weight 700 kg
Plasma chamber configuration
4 magazines in pre-defined positions
2 powered planar electrodes with insulated RF guards
Stainless steel AISI 304 chamber 450W x 450L x 450H mm (91.1 L)
Direct plasma
Max product size
Magazine: 240W x 302L x 160H mm
With or without side slots
Min product size
N/A
Plasma generator
600W RF Generator 13.56 MHz
Automatic L/C tuning network with preset tuning
Silver-coated copper RF line
Gas lines
2 Process gas lines with Mass Flow Controller
1 Purge line
Max flow rate 200 mL/min
Pumping system
Dry vacuum pump 1000 L/min
Capacitive gauge 0.0001 to 1 mbar
Controller
Win11 LTSC PC with fieldbus 21.5" Touchscreen
Proprietary SCI software
Facilities
Single phase 110-240V 50/60 Hz 3.4KVA
CDA 5 to 6 bar
Process gas pressure 1 to 1.5 bar
Process gas purity 99.995% or better
Swagelok 6 mm OD gas fittings
Exhaust port 25 mm OD
Certifications
CE S2 S8 Cleanroom ISO5 (100)
Options
Hydrogen generator (up to 500 mL/min)
1kW RF Generator 13.56 MHz
Dry vacuum pump 1670 L/min
Up to 4 mass flow controlled gas lines
Compare SCI Systems
JUNO-M
Category
Lead frames
Lead frames
Lead frames
Machine Type
Advanced Batch Plasma System
Automated Batch Plasma System
High Volume Plasma System
Footprint
905W x 1222L x 1800H mm
Weight 700 kg
1561W x 2302L x 1931H mm
Weight 1400 kg
784W x 1838L x 1566H mm
Plasma Chamber Configuration
4 magazines in pre-defined positions
2 powered planar electrodes with insulated RF guards
Stainless steel AISI 304 chamber 450W x 450L x 450H mm (91.1 L)
Direct plasma
2 independent plasma chambers, each with 2 planar electrodes and 2 perpendicular gas distribution systems
Nickel-coated aluminium chambers 190W x 230L x 360H mm (15.7 L)
Direct plasma
4 or 5 strips processed at the same time
Max product size
Magazine: 240W x 302L x 160H mm
With or without side slots
Magazine: 115W x 150L x 253H mm
Lead frame: 100W x 300L x 1.5H mm Magazine: 107W x 300L x 250H mm
Min product size
N/A
Magazine: 90W x 50L mm
Lead frame: 22W x 50L x 0.05H mm Magazine: 30W x 50L mm
Plasma generator
600W RF Generator 13.56 MHz
Automatic L/C tuning network with preset tuning
Silver-coated copper RF line
600W RF Generators 13.56 MHz
Automatic L/C tuning networks with preset tuning
600W RF Generator 13.56 MHz
Automatic tuning system
Gas lines
2 Process gas lines with Mass Flow Controller
1 Purge line
Max flow rate 200 mL/min
2 Process gas lines with Mass Flow Controller
1 Purge line
Max flow rate 200 mL/min
2 Process gas lines with Mass Flow Controller
Pumping system
Dry vacuum pump 1000 L/min
Capacitive gauge 0.0001 to 1 mbar
Dry vacuum pump 1000 L/min
Capacitive gauge 0.0001 to 1 mbar
Dry vacuum pump 1000 L/min
Controller
Win11 LTSC PC with fieldbus 21.5" Touchscreen
Proprietary SCI software
Win11 LTSC PC with fieldbus 21.5" Touchscreen
Proprietary SCI software
Win11 LTSC PC with fieldbus 21" Touchscreen
Proprietary SCI software
Facilities
Single phase 110-240V 50/60 Hz 3.4KVA
CDA 5 to 6 bar
Process gas pressure 1 to 1.5 bar
Process gas purity 99.995% or better
Swagelok 6 mm OD gas fittings
Exhaust port 25 mm OD
Three phase 380-415V 50/60 Hz 9.3KVA
CDA 5 to 6 bar
Process gas pressure 1 to 1.5 bar
Process gas purity 99.995% or better
Swagelok 6 mm OD gas fittings
Exhaust ports 100 and 25 mm OD
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications
CE S2 S8 Cleanroom ISO5 (100)
CE S2 S8 Cleanroom ISO7 (10k)
CE S2 S8 E10 Cleanroom ISO7 (10k)
Options
Hydrogen generator (up to 500 mL/min)
1kW RF Generator 13.56 MHz
Dry vacuum pump 1670 L/min
Up to 4 mass flow controlled gas lines
Hydrogen generator (up to 500 mL/min)
1kW RF Generator 13.56 MHz
Dry vacuum pump 1670 L/min
Up to 4 mass flow controlled gas lines
Cleanroom ISO5 (100) compatible
Stainless steel AISI 304 plasma chamber
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package to scan each lead frame
Purge line